VLD Manual Valves

The VLD series provides the same performance as that of the KD series with a stream-lined actuator and body design. The forged body, and simple actuator design, makes this a lower-cost option.

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FEATURES

While maintaining the same degree of basic performance, material, and cleaning, the VLD series realizes security and low cost through overall reduction of the number of parts and changes to the review and processing methodology.
Because the cleaning and inspection processes are the same as our conventional model, there is no change in reliability and durability.
Achieves maximum particle performance for high-purity gases used in semiconductor by the highest-level manufacturing environment and polishing process.

WETTED AREA MATERIAL

SUS316L, SUS316LE (Double Melt Material)
PCTFE, PFA, PI
Cobalt Alloy

PRECAUTIONS

The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Product Selection

JUMP TO: Specifications Product Grade Product Code Key Product Selection

Product Details

Specifications
Size		VLD4 (1/4")	VLD8 (1/2")
Cv		0.27	0.7
Maximum Operating Pressure		142psig(0.98MPa (G))
Wetted Area Volume		1.36cm³	7.3cm³
Fluid Temperature	PCTFE	-10ºC~80ºC
	PFA (Manual)	-10ºC~150ºC
	PI (Manual)	-10ºC~150ºC
Leak Rates	Across the Seat He Leak Test Rates	≤ 1×10^-10Pa·m³/sec
	Inboard He Leak Test Rates	≤ 1×10^-10Pa·m³/sec
Atmospheric Temperature		-10ºC~60ºC
Cycle Life *	Manual Valve	100,000 cycles
* Test Condition / Seat material : PCTFE Gas : N2 Pressure : 0.98MPa
Product Grade
Grade	STD	EP	SEP
Body Materials	SUS316L		SUS316LE (Double Melt Material)
Surface Roughness	≤ Rz 3.2 µm	≤ Rz 0.7 µm
	≤Ra 0.5μm / 20 μin	≤ Ra 0.13 μm / 5 μin
Polish	Mechanical Polish	Electro Polish
Cleaning	Degreasing + Precision Cleaning
Packing	Single Bagged Package	Double Bagged Package

PRODUCT CODE KEY

Model

Size

Operation

Valve Shape

Main Pipe Connection

Main Pipe Size

B-Port Connection

Seat Material

Handle Color

Grade + Body Material

VLD

15A

EP-316L

VLD - type
Diaphragm Valve

4: 1/4"
6: 3/8"
8: 1/2"

M: 270° Manual

S: Straight
B: Branch *1

Not Shown: Standard
W: Butt Weld

Not Shown: Standard
15A, 20A
25A, 32A
40A, 50A
65A

V: CVC Male
VF: CVC Female
S: Compression
*2

C: PCTFE
A: PFA
P: PI

Not Shown: Blue (Standard)
RD: Red
GR: Green
SL: Silver
BK: Black
YE: Yellow
BR: Brown

STD-316L: Mechanical Polish + SUS316L
EP-316L: Electro Polish + SUS316L
SEP-316LE: Electro Polish + SUS316LE
*3

*1 For details, please speak with a sales representative.
*2 For B-port fitting types other than shown, please consult a sales representative.
*3 Regardless of body material, the T-shape section of ports A-C will be SUS316L.