High-Speed, High-Durability Valves 200C

Kitz SCT TDF series product.

High-Speed, High-Durability Valves 200C

The TDF series is KITZ SCT's high speed/high durability valve perfect for ALD and similar type processes requiring pulsing. The actuation time of the TDF valve's sealing diaphragm is 5 milliseconds, and full cycle speed is 18 milliseconds. The valve's cycle life rating is 100 million cycles.

Product Details

Specifications
Size1/2″
Cv at 220℃ *10.5
Maximum Operating Pressure101.5psig (0.7 MPa(G))
Wetted Area Volume0.1172in3 (1.92 cm3 (C-seal, 2-port))
0.1532in3 (2.51 cm3 (C-seal, 3-port))
Fluid Temperature80℃~220℃ *2
Atmospheric Temperature20℃~130℃
20℃~70℃
(with sensor and solenoid valve installed)
Response Speed *318±2 ms
Leak Rates (Room temperature
when shipped)
Across the Seat He Leak Rates≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/sec)
Inboard He Leak Rates≤ 1×10-9 sccs (≤ 1×10-10Pa·m3/sec)
Actuation pressure65.3-87.0psig (0.45 ‒ 0.6 MPa(G))
*1 The minimum value is stated by Cv value measurement (220˚C) based on SEMASPEC90120394B-STD.
*2 Room temperature - 220°C if not used continuously, and up to 200°C with sensor and
solenoid valve installed.
*3 Motion of the valve from a closed state to opening; Time between the instant when the
solenoid valve signal is turned ON and the instant when the valve is fully opened under
the following conditions:
(Operating pressure: 0.48MPa, tube: length between the solenoid valve and the valve
76.2mm, inside diameter 2mm)
Product Grade
GradeSTDEPSEP
Body MaterialSUS316LSUS316LE (Double melt material)
Surface Roughness≦ Rz 3.2 μm≦ Rz 0.7 μm
PolishMechanical polishedElectro polished
CleaningDegreasing + Precision cleaning
PackagingSingle bagged packageDouble bagged package
PRODUCT CODE KEY
Model
Size
Operation
Valve Shape
Connection
Fitting Size
Seat Material
Open/Close Sensor
Option
Grade
TDF
8
C
S
-
G
_
A
-
S
-
_
-
EP-316L
TDF - type
Diaphragm Valve
(High-speed high-durability spec)
8: 1.5" HF
C: Pneumatic Valve
Normally Closed
S: Straight
B: Branch
G: C-seal
Surface Mount
V: CVC Male
VF: CVC Female
Not shown: 1/2"
4: 1/4"
(CVC only)
A: PFA
Not Shown: Without sensor
S: With open/close sensor
Serial no: Sensor spec with solenoid valve
Other special spec
STD-316L: Mechanical Polished + SUS316L
EP-316L: Electro Polished + SUS316L
SEP-316LE: Electro Polished + Double melt material

* For normally open type, contact our sales representative.