VLD Pneumatic Valves

The VLD series provides the same performance as that of the KD series with a stream-lined actuator and body design. The forged body, and simple actuator design, makes this a lower-cost option.

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FEATURES

While maintaining the same degree of basic performance, material, and cleaning, the VLD series realizes security and low cost through overall reduction of the number of parts and changes to the review and processing methodology.
Because the cleaning and inspection processes are the same as our conventional model, there is no change in reliability and durability.
Achieves maximum particle performance for high-purity gases used in semiconductor by the highest-level manufacturing environment and polishing process.

WETTED AREA MATERIAL

SUS316L, SUS316LE (Double Melt Material)
PCTFE
Cobalt Alloy

PRECAUTIONS

The valves are designed to be used under atmospheric pressure. Usage such as under vacuum vessels are not guaranteed.
For high temperature applications, please select appropriate material for air-fittings and tubes to assure proper performance.

Product Selection

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Product Details

Specifications
Size		VLD4 (1/4")	VLD8 (1/2")
Cv		0.27	0.7
Maximum Operating Pressure		142psig(0.98MPa (G))
Wetted Area Volume		1.36cm³	7.3cm³
Fluid Temperature	PCTFE	-10ºC~80ºC
Leak Rates	Across the Seat He Leak Test Rates	≤ 1×10^-10Pa·m³/sec
	Inboard He Leak Test Rates	≤ 1×10^-10Pa·m³/sec
Atmospheric Temperature		-10ºC~60ºC
Actuation Pressure (Pneumatic)		0.4~0.7MPa (G)
Cycle Life *	Pneumatic Valve	4 million cycles
* Test Condition / Seat material : PCTFE Gas : N2 Pressure : 0.98MPa
Product Grade
Grade	STD	EP	SEP
Body Materials	SUS316L		SUS316LE (Double Melt Material)
Surface Roughness	≤ Rz 3.2 µm	≤ Rz 0.7 µm
	≤Ra 0.5μm / 20 μin	≤ Ra 0.13 μm / 5 μin
Polish	Mechanical Polish	Electro Polish
Cleaning	Degreasing + Precision Cleaning
Packing	Single Bagged Package	Double Bagged Package

PRODUCT CODE KEY

Model	Size	Operation	Valve Shape		Connection	Seat Material		Grade + Body Material
VLD	4	C	S	-	VF	C	-	EP-316L
VLD - type Diaphragm Valve	4: 1/4" 6: 3/8" 8: 1/2"	C: Normally Closed	S: Straight		V: CVC Male VF: CVC Female S: Compression	C: PCTFE		STD-316L: Mechanical Polish + SUS316L EP-316L: Electro Polish + SUS316L